TRIANT Pioneering Change in Fab Effectiveness for the Semiconductor Industry

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What is Triant's ModelWare®? What Triant's ModelWare® does How Triant's ModelWare® works How Triant's ModelWare® helps

What it is - Top of Page

Triant's ModelWare® is a modular suite of software components developed to monitor equipment health and detect faults in semiconductor fabrication equipment. ModelWare® functions through Universal Process Modeling, or UPM.

UPM is a unique technology developed by Triant for use in modeling complex equipment. UPM is an inductive, or example-based, modeling technique which uses a reference library made of data collected from previous "good" lots, to describe how a tool normally operates.

The resulting multivariate model defines a tool's expected behavior for a specific recipe, and allows the software to detect significant differences in equipment operation.

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What it does - Top of Page

ModelWare® uses UPM to create a multivariate model of the tool. The modeling software runs in real-time, calculating predictions of sensor readings and system health to any given operating condition, based on past tool behavior.

For every sensor sample, ModelWare® calculates in real-time a prediction and normalizes the difference between the observation and the prediction to find residual error. The normalized residual error is referred to as "Signal Health".

ModelWare® calculates an index of system health based on the residual error of all the readings in the sample set.

ModelWare® expresses system health and signal health as single metrics reflecting how many standard deviations the collected signal is from the "ideal".

System and signal health readings are used to detect emerging faults.

ModelWare® allows you to specify alarms based on fluctuations in system health and signal healths.

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How it works - Top of Page

ModelWare® is composed of a modular suite of components to build models, collect, display and store data, and perform analysis and reporting functions. Some of these functions, like reporting or model building, can be automated for ease in use and deployment.

ModelWare®'s modular architecture makes it possible to deploy as a stand-alone engineer's tool, or as an integral part of a fab-wide Computer Integrated Manufacturing (CIM) system.

ModelWare®'s core components run under Windows NT or Unix, and make results available on any workstation on your network.

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How it helps - Top of Page Using ModelWare® gives you direct benefits in overall equipment efficiency (OEE) by increasing uptime, reducing downtime, and increasing your quality efficiency. ModelWare® can help you: Reduce scrap due to equipment faults Reduce the number of Qual wafers you have to run Reduce down time Lengthen your maintenance cycle
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