TRIANT TECHNOLOGIES INC. Pioneering Change in Fab Effectiveness for the Semiconductor Industry

Triant Technologies Inc.
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Data Flow
How ModelWare® Works
The ModelWare® components
Configuring ModelWare®
Tool-side PC Configuration
Terminal Server Configuration
Integrated Configuration

Data Flow - Top of Page

Click to see descriptions

How ModelWare® Works - Top of Page

Once ModelWare® is set up, production and tool operation can be monitored. Data can be viewed in real-time or offline from any monitor on the system.

The ModelWare® components: - Top of Page

collect data from all sensors configured for collection in DC (active is a modeling property attached to a particular sensor which means it will contribute to system health. Other properties include passive and data only. ),
analyze data according to the multivariate model, or using the simple SPC alarm model
monitor tool operation and system health in real-time, providing graphic display
archive the data for later analysis
access archived data
generate reports on tools, recipes, and sensors.

The multivariate model can be set up for automatic fine-tuning based on changes in the sensor data.

Configuring ModelWare® - Top of Page

*ModelWare® can be installed in different configurations to suit your fab:*
Tool-side PC Configuration	on a single piece of equipment, using a tool-side PC
Terminal Server Configuration	multiple pieces of equipment, using a terminal server
Integrated Configuration	integrated into the fab data collection solution, using existing fab infrastructure

Tool-side PC Configuration - Top of Page

In a tool-side PC configuration, the PC is located in the fab close to the equipment being monitored. The PC is configured to run the full suite of ModelWare® components.

Component	Run On Tool-Side PC	Run On Network PC
Data Collector	yes	no
Analysis Engine	yes	yes
Real-Time Data Viewer	yes	yes
Archive Data Viewer	yes	yes
Model Editor	yes	yes
Archive Collector	yes	yes
Report Generator	yes	yes
Model Automation	yes	yes

Any combination of configurations shown in the table is valid for a tool-side PC.

Viewers and editors can run on the PC as well as on one or more Network PCs.

The minimum recommended PC for a tool-side configuration is:

200 MHz Pentium Processor

32 Mb of RAM

2 Gb Hard Drive

2 available Serial Ports

An optional failsafe bypass switch is available to ensure that communication between the host and the tool is never interrupted by a failure of the tool-side PC

Terminal Server Configuration - Top of Page

Using a terminal server allows a single ModelWare PC to collect data from up to 8 tools.

When configuring ModelWare® with a terminal server:

the terminal server, which has a smaller footprint than a PC, is located in the fab

the data collection PC can be located outside of the fab for easier access.

the ModelWare PC is usually configured with two network cards so that the data collection traffic is not seen on the factory network.

The minimum recommended PC for a terminal server configuration is:

400 MHz Pentium II

64 Mb of RAM

12 Gb Hard Drive

2 Ethernet Cards

Optional bypass switches (not shown) can be installed to ensure host-tool communication in the event of a PC or terminal server failure.

Integrated Configuration - Top of Page

In a typical integrated configuration, the factory control system is responsible for collecting the sensor data from the tools. Collected data is sent to one or more ModelWare workstations for analysis.

Up to 200 simultaneous models can be analyzed on a single high-end, dedicated server.

ModelWare® components can be run under UNIX or Windows NT.

Component	Run On Windows NT	Run On UNIX
Data Collector	n/a	n/a
Analysis Engine	yes	yes
Real-Time Data Viewer	yes	no
Archive Data Viewer	yes	no
Model Editor	yes	no
Archive Collector	yes	no
Report Generator	yes	no
Model Automation	yes	yes

Contact Triant for more information regarding the available integration options for passing data between the factory control system and the ModelWare® components.